The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)

1:15 PM - 1:45 PM

[11p-B2-1] [INVITED] Nanoimprint process using condensable gas PFP

〇Hiroshi Hiroshima1 (1.AIST)

Keywords:nanoimprint,pentafluoropropane,PFP