The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)

4:15 PM - 4:30 PM

[11p-B2-11] Nano-object Figuration by UVN-ALD (II) ~Installation of ALD equipment and investigation of Al2O3 deposition for resin surface~

〇(B)Shiho Kuroyanagi1, Nobuya Hiroshiba1, Masaru Nakagawa1 (1.IMRAM, Tohoku univ.)

Keywords:UV nanoimprint,atomic layer deposition