The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)

4:00 PM - 4:15 PM

[11p-B2-10] UV nanoimprinting using carbon-coated AAO molds

〇Masaru Nakagawa1, Akifumi Nakaya1, Yasuto Hoshikawa1, Takashi Kyotani1 (1.IMRAM, Tohoku Univ.)

Keywords:UV nanoimprint,resists,molds and masks