[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

[11p-B2-9] Control of the amount of UV-curable resin droplets discharged by screen printing for equalizing a residual layer thickness after UV nanoimprinting

〇(M1)Akira Tanabe¹, Uehara Takuya¹, Nagase Kazuro², Ikedo Hiroaki², Hiroshiba Nobuya¹, Nakagawa Masaru¹ (1.IMRAM, Tohoku Univ., 2.Mino Group)

Keywords:UV nanoimprinting,screen printing