2:15 PM - 2:30 PM
[11p-B2-4] Formation of randomly-aligned in-plane cylindrical domains of polystyrene-b-polydimethylsiloxane by thermal annealing method (2)
Keywords:block copolymer,microphase separation,lithography
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication
Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)