The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)

3:30 PM - 3:45 PM

[11p-B2-8] Nanoimprint-graphoepitaxy for liquid crystalline polymer

〇Makoto Okada1, Risa Hosoda2, Yusuke Taniguchi2, Yuichi Haruyama1, Hiroshi Ono3, Nobuhiro Kawatsuki2, Shinji Matsui1 (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

Keywords:Nanoimprint,Liquid crystal