The 62nd JSAP Spring Meeting, 2015

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Symposium » Advanced CMOS Technology and Its Future Scope

[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

Wed. Mar 11, 2015 1:15 PM - 5:30 PM B5 (6B-105)

1:30 PM - 2:00 PM

[11p-B5-2] A Model for Plasma-induced Physical Damage in Three-dimensional Structures

〇Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)

Keywords:semiconductor,plasma,defect