[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

[11p-B5-5] Technology for suppressing variability and low frequency noise in FinFETs

〇Takashi Matsukawa¹, Koichi Fukuda¹, Yongxun Liu¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Kazuhiko Endo¹, Shin-ichi O'uchi¹, Shinji Migita¹, Wataru Mizubayashi¹, Yukinori Morita¹, Hiroyuki Ota¹, Meishoku Masahara¹ (1.AIST)

Keywords:FinFET,variability,low frequency noise