[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

[11p-B5-6] AC performance improvement by RMG module for 14nm FinFETs and beyond

〇Mitsuhiro Togo¹, M. Joshi¹, H. V. Meer¹, C. Yong¹, B. Liu¹, X. He¹, X. Wu¹, S. Y. Mun¹, X. Zhang¹, D. Konduparthi¹, J. Lian¹, G. Bohra¹, W. H. Tong¹, C. Y. Xiao¹, D. Triyoso¹, E. Banghart¹, S. M. Pandey¹, A. Wei¹, R. Pal¹, R. Carter¹, M. H. Nam¹, M. Eller¹, S. Samavedam¹ (1.GLOBALFOUNDRIES)

Keywords:FinFET,Replacement Metal Gate,AC performance