[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

[11p-B5-7] Systematic Understanding of Variability, Current Noise, and Threshold Voltage Shift in Silicon Tri-gate Nanowire Transistors

〇Masumi Saitoh¹, Kensuke Ota¹, Chika Tanaka¹, Daisuke Matsushita¹, Toshinori Numata¹ (1.Toshiba Corp.)

Keywords:nanowire transistor,tri-gate,silicon