The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[11p-D1-1~17] Joint Session K

Wed. Mar 11, 2015 1:15 PM - 5:45 PM D1 (16-101)

4:15 PM - 4:30 PM

[11p-D1-12] Zn-doping Effect in Amorphous InWO Thin-film Transistors

〇(P)Takio Kizu1, Miki Miyanaga2, Hideaki Awata2, Toshihide Nbatame1, Kazuhito Tsukagoshi1 (1.NIMS, 2.Sumitomo Electric Industries Ltd.)

Keywords:Oxide semiconductor,TFT,Low-temperature process