The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[12a-A21-1~13] 13.8 Compound and power electron devices and process technology

Thu. Mar 12, 2015 9:00 AM - 12:30 PM A21 (6A-213)

9:30 AM - 9:45 AM

△ [12a-A21-3] Mapping of degradation of AlGaN/GaN HEMTs using scanning internal photoemission microscopy

〇Shingo Yamamoto1, Shinya Hatakeyama2, Tetsuya Suemitsu2, Kenji Shiojima1 (1.Univ. of Fukui, 2.Tohoku Univ.)

Keywords:scanning internal photoemission microscopy,Shottky contact,HEMT