The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.6 Semiconductor English Session

[12a-A23-1~12] 13.6 Semiconductor English Session

Thu. Mar 12, 2015 9:00 AM - 12:15 PM A23 (6A-216)

9:00 AM - 9:15 AM

▲ [12a-A23-1] Surface potential observation of heavily-doped Si by KPFM

〇(D)Krzysztof Tyszka1, 2, Daniel Moraru1, Takeshi Mizuno1, Ryszard Jablonski2, Mihicharu Tabe1 (1.Shizuoka Univ., 2.Warsaw Univ. of Tech.)

Keywords:Kelvin Probe Force Microscope