The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.6 Semiconductor English Session

[12a-A23-1~12] 13.6 Semiconductor English Session

Thu. Mar 12, 2015 9:00 AM - 12:15 PM A23 (6A-216)

9:15 AM - 9:30 AM

▲ [12a-A23-2] Development of apparatus supplying hydrogen radical remotely to decompose SiCl4 source

〇(D)Fatima DAHMANI1, Yuji OKAMOTO1, 2, Daiki TSUTSUMI1, 3, Takamasa ISHIGAKI3, Hideomi KOINUMA4, Sumiya MASATOMO1 (1.NIMS inst., 2.TSUKUBA Univ., 3.Hosei Univ., 4.Tokyo Univ.)

Keywords:hydrogen radical,SiCl4