The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

[12a-A27-1~9] 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

Thu. Mar 12, 2015 10:00 AM - 12:30 PM A27 (6A-202)

12:15 PM - 12:30 PM

[12a-A27-9] Laser-assisted Atom Probe Tomography with Deep-Ultraviolet Laser

〇Teruyuki Kinno1, Tadakatsu Ohkubo2, Mitsuhiro Tomita1, Kazuhiro Hono2 (1.Toshiba R&D Center, 2.NIMS)

Keywords:Atom Probe Tomography,Laser