The 62nd JSAP Spring Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12a-C1-1~10] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 9:00 AM - 11:45 AM C1 (6C-104)

9:45 AM - 10:00 AM

△ [12a-C1-4] C-H diamond MOSFET with trench-channel

〇Toshiki Saito1, Mikinori Kobayashi1, Tetsuya Yamada1, Dechen Xu1, Yuya Kitabayashi1, Daisuke Matsumura1, Hidetoshi Tsuboi1, Masafumi Inaba1, Atsushi Hiraiwa1, Hiroshi Kawarada1 (1.Waseda Univ.)

Keywords:diamond,FET