[12a-P12-1~7] 13.3 Insulator technology

[12a-P12-1] First principles study on atomic defects in insulators of MONOS memory

〇Shirakawa Hiroki¹, Masaaki Araidai², Katsumasa Kamiya³, Kenji Shiraishi² (1.Univ. of Tsukuba, 2.Nagoya Univ, 3.Kanagawa Inst. of Tech)

Keywords:MONOS,First principles calculation