[12a-P12-1~7] 13.3 Insulator technology

[12a-P12-7] Study on the formation of Al germanate on Ge substrate by radical-enhanced ALD

Tomoya Yokohira¹, 〇Kousei Yanachi¹, Byeonghak Yoo², Chiaya Yamamoto², Junji Yamanaka², Tetsuya Sato², Hiroshi Okamoto³, Yukio Fukuda¹ (1.Tokyo Univ. of Science, Suwa, 2.Univ. of Yamanashi, 3.Hirosaki Univ.)

Keywords:RE-ALD,Al germanate