9:30 AM - 11:30 AM
[12a-P12-7] Study on the formation of Al germanate on Ge substrate by radical-enhanced ALD
Keywords:RE-ALD,Al germanate
Poster presentation
13 Semiconductors » 13.3 Insulator technology
Thu. Mar 12, 2015 9:30 AM - 11:30 AM P12 (Gymnasium)
9:30 AM - 11:30 AM
Keywords:RE-ALD,Al germanate