The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[12p-A18-1~18] 15.8 Crystal evaluation, impurities and crystal defects

Thu. Mar 12, 2015 2:00 PM - 7:00 PM A18 (6A-208)

4:30 PM - 4:45 PM

[12p-A18-10] The temperature dependency of Hydrogen-related donor and interstitial Silicon cluster formation in FZ-Silicon irradiated with MeV Proton

〇AKIRA KIYOI1, MASAYUKI TANAKA1, TSUYOSHI KAWAKAMI1, HIROZO TSURUTA1, JYUNJI TANIMURA1, TADAHARU MINATO2, TARUTANI MASAYOSHI2 (1.Mitsubishi Electric Co. Advanced Technology R&D Lab, 2.Mitsubishi Electric Co. Power Device Works)

Keywords:Silicon,point defects