[12p-A18-1~18] 15.8 Crystal evaluation, impurities and crystal defects

△ [12p-A18-10] The temperature dependency of Hydrogen-related donor and interstitial Silicon cluster formation in FZ-Silicon irradiated with MeV Proton

〇AKIRA KIYOI¹, MASAYUKI TANAKA¹, TSUYOSHI KAWAKAMI¹, HIROZO TSURUTA¹, JYUNJI TANIMURA¹, TADAHARU MINATO², TARUTANI MASAYOSHI² (1.Mitsubishi Electric Co. Advanced Technology R&D Lab, 2.Mitsubishi Electric Co. Power Device Works)

Keywords:Silicon,point defects