[12p-A18-1~18] 15.8 Crystal evaluation, impurities and crystal defects

[12p-A18-18] A program for atomic configuration considering space symmetry in IV semiconductors

〇Kouji Sueoka¹, Ryo Matsutani¹, Sho Shirasawa¹, Eiji Kamiyama^{1, 2}, Koji Izunome², Kazuhiko Kashima², Osamu Nakatsuka³ (1.Okayama Pref. Univ., 2.Globalwafers, 3.Nagoya Univ.)

Keywords:Semiconductor crystal,Atomic configuration,Space synnetry