The 62nd JSAP Spring Meeting, 2015

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Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[12p-A18-1~18] 15.8 Crystal evaluation, impurities and crystal defects

Thu. Mar 12, 2015 2:00 PM - 7:00 PM A18 (6A-208)

6:30 PM - 6:45 PM

[12p-A18-17] Effective gettering sites for metals in Si wafer searched by first principles calculation

〇Sho Shirasawa1, Koji Sueoka1, Kazuyoshi Maekawa2, Tadashi Yamaguchi2 (1.Okayama Pref. Univ., 2.Renesas Electronics)

Keywords:gettering,Si crystal,first principles calculation