Proximity Gettering of Carbon Cluster Ion Irradiated Silicon Wafers (4) - Effects of Cold Cluster Irradiation on Defects Formation -

Presentation information

Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

Thu. Mar 12, 2015 2:00 PM - 7:00 PM A18 (6A-208)

6:15 PM - 6:30 PM

〇Ryo Hirose¹, Ryosuke Okuyama¹, Takeshi Kadono¹, Takuro Iwanaga¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO CORP.)

Keywords:Cold Cluster Irradiation,Irradiation Defects Formation,Amorphization