The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

5:45 PM - 6:00 PM

[12p-C1-14] Source of N atoms of a-CNx:H films formed from the microwave discharge flow of the gas mixture of N2 and CH3CN

〇(M1)Nobuyoshi Mogi1, Hiroki Tsudome1, Haruhiko Ito1 (1.Nagaoka Univ. of Tech)

Keywords:amorphous carbon nitride film