[12p-P10-1~8] 8.3 deposition of thin film and surface treatment

[12p-P10-5] Hydrophilzation of polyimide surface using Inward-plasma

〇ryou Kanou¹, Hiroshi Suga¹, Satoshi Takahashi², Yuuya Shirayama², Syunichirou Shinbori², Tetsuo Shimizu³ (1.CIT, 2.Sanyou Co.,Ltd., 3.AIST)

Keywords:Inward-plasma,polyimide,Hydrophilzation