[12p-P16-1~19] 15.4 III-V-group nitride crystals

[12p-P16-19] Viscoelasticity and adhesion property of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)

〇Masao Noma¹, Michiru Yamashita², Koji Eriguchi³, Shigehiko Hasegawa⁴ (1.SHINKO SEIKI. Co., LTD., 2.Hyogo Prefectural Institute of Technology, 3.Kyoto Univ., 4.Osaka Univ.)

Keywords:BN,PVD,Viscoelasticity