[13a-A24-1~13] 13.3 Insulator technology

[13a-A24-13] Ferroelectric characteristics of HfO₂ in TiN/HfO₂/TiN stack

〇Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

Keywords:HfO2,Ferroelectric