The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[13a-A24-1~13] 13.3 Insulator technology

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A24 (6A-217)

9:30 AM - 9:45 AM

[13a-A24-3] Fabrication and Evaluation of SiO2/Si Structures by Kr/O2 Plasma Oxidation at Low Temperature

〇yuta fujikawa1, yoshitaka iwazaki1, tomo ueno1 (1.TAT)

Keywords:Plasma Oxidation,krypton