[13p-D1-1~11] Joint Session K

△ [13p-D1-2] Thermodynamic Study of Thermal Stability of β-Ga₂O₃ in Mixed Flows of H₂ and N₂

〇Rie Togashi¹, Kazushiro Nomura¹, Chihiro Eguchi¹, Takahiro Fukizawa¹, Ken Goto², Hisashi Murakami¹, Yoshinao Kumagai¹, Akito Kuramata², Shigenobu Yamakoshi², Akinori Koukitu¹ (1.Tokyo Univ. of Agri. & Tech., 2.Tamura Corporation)

Keywords:semiconductor,thermodynamic analysis,heat treatment