PDF Download Schedule 14 Like 0 4:45 PM - 5:00 PM [13p-D1-3] Evaluation of Crystal Defect in β-Ga2O3 Crystal (2) 〇Tetsuya Nagai1, Kengo Noami1, Katsuhiko Nakai1, Toshiro Futagi1 (1.NSST) Keywords:Ga2O3,TEM