The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[14a-A24-1~12] 13.3 Insulator technology

Sat. Mar 14, 2015 9:00 AM - 12:15 PM A24 (6A-217)

11:45 AM - 12:00 PM

▲ [14a-A24-11] Reliability-aware Germanium Gate Stack Formation by GeO2 Network Modification

〇Cimang Lu1, 2, Choong Hyun Lee1, 2, Tomonori Nishimura1, 2, Kosuke Nagashio1, 2, Akira Toriumi1, 2 (1.The Univ. of Tokyo, 2.JST-CREST)

Keywords:Germanium,Reliability