The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[14a-A24-1~12] 13.3 Insulator technology

Sat. Mar 14, 2015 9:00 AM - 12:15 PM A24 (6A-217)

10:45 AM - 11:00 AM

△ [14a-A24-7] Study of pure nitridation process for GaSb surface

〇(M2)Takahiro Gotow1, 2, Sachie Fujikawa1, Hiroki I. Fujishiro1, Mutsuo Ogura2, Tetsuji Yasuda2, Tatsuro Maeda1, 2 (1.Tokyo Univ. Science, 2.AIST)

Keywords:GaSb,Nitridation