Surface potential distribution of BaSi<sub>2</sub> thin film on multicrystalline Si by Kelvin probe force microscopy

YUNPENG LI

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[14a-A25-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A25 (6A-218)

9:45 AM - 10:00 AM

[14a-A25-4] Surface potential distribution of BaSi₂ thin film on multicrystalline Si by Kelvin probe force microscopy

〇YUNPENG LI¹, Masakazu Baba¹, Ryohei Numata¹, Kaoru Toko¹, Noritaka Usami^2,⁴, Takashi Sekiguchi³, Takashi Suemasu^1,⁴ (1.Univ.Tsukuba, 2.Univ. Nagoya, 3.NIMS, 4.JST-CREST)

Keywords:semiconductor,Silicide,KFM

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Presentation information

[14a-A25-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[14a-A25-4] Surface potential distribution of BaSi2 thin film on multicrystalline Si by Kelvin probe force microscopy

[14a-A25-4] Surface potential distribution of BaSi₂ thin film on multicrystalline Si by Kelvin probe force microscopy