9:00 AM - 9:15 AM
[14a-A27-1] Etching reaction of magnetic materials by CO cluster injection (2)
Keywords:cluster,MRAM
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
9:00 AM - 9:15 AM
Keywords:cluster,MRAM