11:45 AM - 12:00 PM
[14a-A27-11] A Model for enhancement of plasma-induced radiation damage to low-k dielectrics with Cu lines
Keywords:plasma-induced radiation damage,low-k damage,near-field
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
11:45 AM - 12:00 PM
Keywords:plasma-induced radiation damage,low-k damage,near-field