11:30 AM - 11:45 AM
△ [14a-A27-10] Plane Orientation Dependence of Plasma-induced Si Substrate Damage Assigned by Optical Indices
Keywords:plasma-induced damage
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
11:30 AM - 11:45 AM
Keywords:plasma-induced damage