11:15 AM - 11:30 AM
[14a-A27-9] Analysis of H2 and He Plasma-induced Damage Structures by 1/C2 Method
Keywords:plasma,defect,anneal
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
11:15 AM - 11:30 AM
Keywords:plasma,defect,anneal