12:45 PM - 1:00 PM
△ [14a-A27-15] Instantaneous generation of many flaked particles in mass-production plasma etching process
Keywords:flaked particle,electric field stress,impulsive force
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
12:45 PM - 1:00 PM
Keywords:flaked particle,electric field stress,impulsive force