The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors

[14a-B4-1~13] 15.6 Group IV Compound Semiconductors

Sat. Mar 14, 2015 9:00 AM - 12:30 PM B4 (6B-104)

9:30 AM - 9:45 AM

[14a-B4-3] Novel Cap-free Annealing of SiC Trench Wafer using TaC/Ta Composite Materials

〇Norihito Yabuki1, Satoshi Torimi1, Satoru Nogami1, Tadaaki Kaneko2 (1.TOYO TANSO, 2.Kwansei Gakuin Univ.)

Keywords:SiC,Activation annealing