Shunya Sakai

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 11:15 AM B3 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[15a-B3-1~9] 13.2 Exploratory Materials, Physical Properties, Devices

9:30 AM - 9:45 AM

[15a-B3-3] The effect of laser annealing for Ge thin films implanted with P⁺ and Sb⁺ ions

〇(M1)Shunya Sakai¹, Kazuya Yamamura¹, Hiroshi Nishigaki¹, Noriyuki Hasuike¹, Hiroshi Harima¹, Woo Sik Yoo² (1.Kyoto Inst. of Tech, 2.WaferMasters Inc.)