10:30 AM - 10:45 AM
〇HU LI1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony)
HU LI
Speaker, Author, Co-Author
Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)
- Oral presentation
- | 8 Plasma Electronics
- | 8.4 Plasma etching