Kaiki Ito

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

9:00 AM - 9:15 AM

[13a-D61-1] Fabrication of Cylindrical Micro-Parts Using Synchronous Scan-Projection Lithography and Chemical Etching

〇Kaiki Ito¹, Yuta Suzuki¹, Toshiyuki Horiuti¹ (1.Tokyo Denki Univ.)