Yoshihiko Hirai

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

11:45 AM - 12:00 PM

[13a-D61-11] Computational study of material optimization on de-molding process in nanoimprint lithography

Florian Chalvin^1,2, Masaaki Yasuda¹, Hiroaki Kawata¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ., 2.Ecole Nat. Sup. Elec. Appl.)