Hodaka Shirataki

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

9:45 AM - 10:00 AM

△ [13a-D61-4] TMAH Developer Intrusion into Resist Film Analyzed by C-V Method of MIS Structure

〇Hodaka Shirataki¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

Wed. Sep 14, 2016 4:00 PM - 6:00 PM P16 (Exhibition Hall)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[14p-P16-1~8] 7.3 Micro/Nano patterning and fabrication

4:00 PM - 6:00 PM

[14p-P16-3] Dielectric Dispersion Analysis of Resist Materials used for lithography

〇Hodaka Shirataki¹, Akira Kawai¹, Shogo Ohtani¹, Hiroki Sasazaki¹ (1.Nagaoka Univ. Tech.)