Ayuta Suzuki

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 2:45 PM - 4:15 PM A41 (Int'l Conf. Room)

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics English Session

[13p-A41-3~8] 8.8 Plasma Electronics English Session

3:00 PM - 3:15 PM

▲ [13p-A41-4] A PIC-MCC plasma model created on COMSOL Multiphysics

〇Ayuta Suzuki¹, Satoru Kawaguchi², Masaaki Matsukuma¹, Kazuki Denpoh¹ (1.Tokyo Electron Ltd., 2.Muroran Inst. of Technol.)