A PIC-MCC plasma model created on COMSOL Multiphysics

Presentation information

Oral presentation

8 Plasma Electronics » 8.8 Plasma Electronics English Session

Tue. Sep 13, 2016 2:45 PM - 4:15 PM A41 (Int'l Conf. Room)

Koichi Sasaki(Hokkaido Univ.)

3:00 PM - 3:15 PM

〇Ayuta Suzuki¹, Satoru Kawaguchi², Masaaki Matsukuma¹, Kazuki Denpoh¹ (1.Tokyo Electron Ltd., 2.Muroran Inst. of Technol.)

Keywords:PIC-MCC, Plasma simulation