[13p-A41-3~8] 8.8 Plasma Electronics English Session

Tue. Sep 13, 2016 2:45 PM - 4:15 PM A41 (Int'l Conf. Room)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

2:45 PM - 3:00 PM

▼ [13p-A41-3] Effect of Width and Number of Slits in Faraday Shield on the Performance of Inductively Coupled Plasma

〇(M1)Makato Moriyama¹, Daisuke Ogawa¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)

3:00 PM - 3:15 PM

〇Ayuta Suzuki¹, Satoru Kawaguchi², Masaaki Matsukuma¹, Kazuki Denpoh¹ (1.Tokyo Electron Ltd., 2.Muroran Inst. of Technol.)

3:15 PM - 3:30 PM

〇Keisuke Takashima¹, Hideaki Konishi¹, Keisuke Shimada¹, Yutaka Kimura¹, Toshiro Kaneko¹ (1.Tohoku Univ.)

3:30 PM - 3:45 PM

〇Tatsuru Shirafuji¹, Kazuhiko Obana¹, Shohei Kito¹ (1.Osaka City Univ.)

3:45 PM - 4:00 PM

〇(D)Hu Rui^1,2, Xiangke Wang², Masaaki Nagatsu¹ (1.Shizuoka Univ., 2.CAS)

4:00 PM - 4:15 PM

〇Seiichiro Shimizu¹, Petros Abraha¹ (1.Meijo Univ.)