Daisuke Matsuda

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 9:30 AM - 12:15 PM C31 (Nikko Kujaku AB)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[14a-C31-1~10] 3.7 Laser processing

11:30 AM - 11:45 AM

[14a-C31-8] The fabrication of a µ-Hillock on a Si wafer by using the long pulse laser at 1030nm

〇Daisuke Matsuda¹, Satoru Amano¹, Shinsuke Goto¹, Kazumi Haga¹, Yuichi Takushima², Noboru Higashi² (1.NanoSystem Solutions, Inc., 2.OPTOQUEST CO., LTD.)

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