Hiroki Tansho

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 9:30 AM - 11:30 AM P2 (Exhibition Hall)

Poster presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[14a-P2-1~13] 3.8 Optical measurement, instrumentation, and sensor

9:30 AM - 11:30 AM

[14a-P2-9] Chemical dry etching of polymer layer using the mixed CF₄/O₂ gas for improvement the side-wall roughness and high sensitivity SPR Sensor

〇(M1)Hiroki Tansho¹, Shota Konuma¹, Yuichi Matsushima², Hiroshi Ishikawa¹, Katsuyuki Utaka¹ (1.Waseda Univ. Faculty of Science and Engineering., 2.GCS Research Organization.)